Epitaxial wafer surface inspection device and epitaxial wafer surface inspection method using the same

The invention provides epitaxial wafer surface inspection device capable of sensing whether or not there is an epitaxial scratch on the epitaxial wafer surface. The epitaxial wafer surface inspection device 100 includes: an optical system 30 having a first spot illumination source 21 arranged at an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KINBARA, HIDEAKI, OSADA, TATSUYA, EGASHIRA, MASAHIKO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!