A method for manufacturing a membrane assembly
A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a planar substrate and at least one membrane layer, wherein the planar substrate comprises an inner region and a border region around the inner region; positioning the stack on a s...
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| creator | VOORTHUIJZEN, WILLEM-PIETER VERBRUGGE, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VAN DER ZANDE, WILLEM JOAN VERMEULEN, JOHANNES PETRUS MARTINUS BERNARDUS VAN ZWOL, PIETER-JAN DRUZHININA, TAMARA KUIJKEN, MICHAEL ALFRED JOSEPHUS CASIMIRI, ERIC WILLEM FELIX VLES, DAVID FERDINAND HOUWELING, ZOMER SILVESTER PETER, MARIA LEENDERS, MARTINUS HENDRIKUS ANTONIUS JANSSEN, PAUL OOSTERHOFF, SICCO |
| description | A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a planar substrate and at least one membrane layer, wherein the planar substrate comprises an inner region and a border region around the inner region; positioning the stack on a support such that the inner region of the planar substrate is exposed; and selectively removing the inner region of the planar substrate using a non-liquid etchant, such that the membrane assembly comprises: a membrane formed from the at least one membrane layer; and a border holding the membrane, the border formed from the border region of the planar substrate. |
| format | Patent |
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positioning the stack on a support such that the inner region of the planar substrate is exposed; and selectively removing the inner region of the planar substrate using a non-liquid etchant, such that the membrane assembly comprises: a membrane formed from the at least one membrane layer; and a border holding the membrane, the border formed from the border region of the planar substrate.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | A method for manufacturing a membrane assembly |
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