SEM image obtaining device and SEM image obtaining method

The present invention relates to a SEM obtaining device and a SEM obtaining method, which is aimed at, in a case of obtaining images from different scanning directions, scanning electron beam in a pixel-corresponding way and obtaining an image and then compositing it, so as to obtain an image of pixel signals from the same position on a mask and achieve the composition. The present invention comprises: a scanning signal generating means for generating a scanning signal that rotates the scanning direction of an electron beam scanning on a sample to irradiates at a position on the sample corresponding to the same region and the same pixel of the sample; a deflection device for deflecting the irradiation of the electron beam based on the generated scanning signal; a detecting and amplifying means for detecting and amplifying the signal from the position of the sample irradiated by the electron beam; and an image generating means for generating an image when irradiating the position on the sample corresponding to