Film-forming apparatus and film-forming-work manufacturing method

Provided are a film-forming apparatus and a film-forming-work manufacturing method with which it is possible, with a simple configuration, to form a film having a uniform thickness on a work having a plurality of surfaces, such as a three-dimensional object or the like. Included are: a target for a...

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Hauptverfasser: YAGI, SOSUKE, FUKUOKA, YOTARO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Provided are a film-forming apparatus and a film-forming-work manufacturing method with which it is possible, with a simple configuration, to form a film having a uniform thickness on a work having a plurality of surfaces, such as a three-dimensional object or the like. Included are: a target for a film-forming material, which includes a plane; a power source unit that applies power to the target; a rotating part that makes a work, on which a film is to be formed, rotate about a rotation axis; and a revolving part that repeatedly moves the work close to and away from the target by making the rotating part revolve about a revolution axis, which is different from rotation axis. During rotation and revolution, the rotation axis is fixed at an angle in which a rotation orbital plane that is orthogonal to the rotation axis has a first inclination angle with respect to a revolution orbital plane that is orthogonal to the revolution axis, and the target is fixed at an angle at which the plane has a second inclinatio