Conveyor device for a substrate

The invention relates to a device for transporting a strip-type substrate (1) through a reactor (20), wherein the substrate (1) is held by transport elements (3, 3', 4, 4', 5, 5', 6, 6') which are displaceable by a drive unit (15, 15') in a transport direction (V). The trans...

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Bibliographische Detailangaben
Hauptverfasser:	GONCALVES, GONCALO PEDRO, TEO, KENNETH B. K, RUPESINGHE, NALIN LALITH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a device for transporting a strip-type substrate (1) through a reactor (20), wherein the substrate (1) is held by transport elements (3, 3', 4, 4', 5, 5', 6, 6') which are displaceable by a drive unit (15, 15') in a transport direction (V). The transport means have first transport beams (3, 3', 4, 4') and second transport beams (5, 5', 6, 6') which engage in alternation on the substrate (1), wherein the transport beams which engage on the substrate (1) are moved in the transport direction (V) and the transport beams which do not engage on the substrate are moved in a reverse direction (R) opposite to the transport direction (V). Transport carriages (13, 13', 14, 14') are provided, which are arranged in pairs in the transport direction (V) respectively upstream and downstream of the reactor (20).