Capacitive fingerprint identification device and manufacturing method thereof
The present invention relates to a capacitive fingerprint identification device and manufacturing method thereof. The capacitive fingerprint identification device includes a plurality of sensing electrodes, a first protective layer and a dielectric material layer. The first protective layer is provi...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The present invention relates to a capacitive fingerprint identification device and manufacturing method thereof. The capacitive fingerprint identification device includes a plurality of sensing electrodes, a first protective layer and a dielectric material layer. The first protective layer is provided with at least one trench, the at least one trench is disposed on the plurality of sensing electrodes. The dielectric material layer is filled in the at least one trench, the dielectric constant of the dielectric material layer between 4-20. By means of the high-k dielectric material layer is filled in the at least one trench, the sensitivity of the capacitive fingerprint identification can be effectively increased. |
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