Fluid supply pipe device using for wet bench tank

A fluid supply pipe device is used for a wet bench tank. The wet bench tank comprises a tank body and a cassette. The cassette is disposed in the tank body and comprises a plurality of slots arranged along a first direction for placing a plurality of wafers. The fluid supply pipe device comprises at...

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Bibliographische Detailangaben

Hauptverfasser:	YEH, YINNG, HUANG, LI-TSO, WU, CHIN-YUAN, HSU, TZU-JENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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