Fluid supply pipe device using for wet bench tank

Fluid supply pipe device using for wet bench tank

A fluid supply pipe device is used for a wet bench tank. The wet bench tank comprises a tank body and a cassette. The cassette is disposed in the tank body and comprises a plurality of slots arranged along a first direction for placing a plurality of wafers. The fluid supply pipe device comprises at...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YEH, YINNG, HUANG, LI-TSO, WU, CHIN-YUAN, HSU, TZU-JENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A fluid supply pipe device is used for a wet bench tank. The wet bench tank comprises a tank body and a cassette. The cassette is disposed in the tank body and comprises a plurality of slots arranged along a first direction for placing a plurality of wafers. The fluid supply pipe device comprises at least one first pipe having a plurality of openings facing the cassette, wherein the at least one first pipe is disposed on a bottom of the tank body and below the cassette. The at least one first pipe passes through a bottom of each slot of the cassette.