Glass for laser processing, and method for producing glass with hole using said glass for laser processing

The present invention provides, in a fine hole batch processing technology that combines etching and the formation of an altered portion by means of UV laser irradiation, a glass composition that makes it possible to produce a hole having a circular outline and a smooth inner wall and enables viable...

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Hauptverfasser: INOUE, TERUHIDE, KURACHI, JUNJI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention provides, in a fine hole batch processing technology that combines etching and the formation of an altered portion by means of UV laser irradiation, a glass composition that makes it possible to produce a hole having a circular outline and a smooth inner wall and enables viable continuous production. The present invention relates to a glass for laser processing, said glass including a coloring component metal oxide, wherein the composition of the glass, expressed by mol%, includes 45.0 % ≤ SiO2 ≤ 68.0%, 2.0% ≤ B2O3 ≤ 20.0%, 3.0% ≤ Al2O3 ≤ 20.0%, 0.1% ≤ TiO2 < 5.0%, and 0% ≤ ZnO ≤ 9.0%, wherein 0 ≤ Li2O+Na2O+K2O < 2.0%.