Mask module for masking a substrate and a corresponding WEB coating installation and a corresponding method for coating a substrate

Mask module for masking a substrate and a corresponding WEB coating installation and a corresponding method for coating a substrate

A mask module for masking a substrate is provided. The mask module includes a mask carrier and a mask. The mask carrier has a back side, a front side and mask carrier apertures. The back side may be designed for facing the substrate and the front side may be designed for facing a coating source. The...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: HENRICH, JURGEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SEMICONDUCTOR DEVICES
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:A mask module for masking a substrate is provided. The mask module includes a mask carrier and a mask. The mask carrier has a back side, a front side and mask carrier apertures. The back side may be designed for facing the substrate and the front side may be designed for facing a coating source. The mask is detachably attached to the back side of the mask carrier. The mask has mask apertures and covers a part of the mask carrier apertures. The mask apertures and the mask carrier apertures may be aligned to allow coating material to pass from the coating source through the mask apertures to the substrate. Further, a coating installation and method for coating a substrate are provided.