Polishing solutions and methods of using same

A polishing solution includes a fluid component and a plurality of conditioning particles. The fluid component includes water, a basic pH adjusting agent, and a polymeric thickening agent. The polymeric thickening agent is present in the fluid component at greater than 0.01 weight percent based on t...

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Bibliographische Detailangaben
Hauptverfasser: COAD, ERIC CARL, GAGLIARDI, JOHN JAMES, SCHWARTZ, EVAN LAWRENCE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A polishing solution includes a fluid component and a plurality of conditioning particles. The fluid component includes water, a basic pH adjusting agent, and a polymeric thickening agent. The polymeric thickening agent is present in the fluid component at greater than 0.01 weight percent based on the total weight of the polishing solution.