Internal member for a plasma treatment apparatus and method of manufacturing the same

In a method of manufacturing an internal member of a plasma processing apparatus, a spray coating layer is formed using a first ceramic material on an internal part of a vacuum chamber for providing a plasma processing space. The surface of the spray coating layer is molten via a melting process to...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KO, HYUNUL, JEONG, DONG-HUN, LEE, SUNG-HOON
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	In a method of manufacturing an internal member of a plasma processing apparatus, a spray coating layer is formed using a first ceramic material on an internal part of a vacuum chamber for providing a plasma processing space. The surface of the spray coating layer is molten via a melting process to form a surface molten layer having denser particle distribution than the spray coating layer. Thermal cracks formed during the melting process are supplemented by filling with a supplementing material including the second ceramic material on the surface molten layer.