Method for separating and recovering alkylene glycol monoalkyl ether, method for recycling liquid waste from processing of resist composition, and method for recycling resist composition processing liquid

The present invention provides a method for separating and recovering, with a high purity and at a high recovery rate, alkylene glycol monoalkyl ether from a solvent mixture containing: alkylene glycol monoalkyl ether; carboxylic acid ester corresponding thereto; and other solvents. By adding an alk...

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Bibliographische Detailangaben
Hauptverfasser:	MIKAWA, YASUHIRO, OGATA, FUJIMARO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR METALLURGY ORGANIC CHEMISTRY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SEPARATION TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention provides a method for separating and recovering, with a high purity and at a high recovery rate, alkylene glycol monoalkyl ether from a solvent mixture containing: alkylene glycol monoalkyl ether; carboxylic acid ester corresponding thereto; and other solvents. By adding an alkali compound to a solvent mixture that contains: alkylene glycol monoalkyl ether (first solvent); alkylene glycol monoalkyl ether carboxylic acid ester (second solvent) corresponding to the alkylene glycol monoalkyl ether (first solvent); and a solvent (third solvent) other than the alkylene glycol monoalkyl ether (first solvent) and the alkylene glycol monoalkyl ether carboxylic acid ester (second solvent), the alkylene glycol monoalkyl ether carboxylic acid ester (second solvent) is saponified and converted into alkylene glycol monoalkyl ether (first solvent). Thereafter, the alkylene glycol monoalkyl ether (first solvent) is recovered by distillation.