Refurbishing method of ruthenium or Ru alloy spent target and reused Ru or Ru alloy target having uniform grain size prepared thereby

The present disclosure provides a refurbishing method of a ruthenium (Ru)-based or ruthenium alloy-based sputtering spent target including: (a) washing or cut-processing the ruthenium-based or ruthenium alloy-based sputtering spent target; (b) placing the washed or cut-processed spent target into a...

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Bibliographische Detailangaben
Hauptverfasser:	YANG, SEUNG-HO, YOON, WON-KYU, KWON, OH-JIB, HONG, GIL-SOO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ALLOYS BASIC ELECTRIC ELEMENTS CASTING CHEMICAL SURFACE TREATMENT CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATERTREATMENT OR WASTE MANAGEMENT COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FERROUS OR NON-FERROUS ALLOYS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER METALLURGY PERFORMING OPERATIONS PHYSICS POWDER METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS WORKING METALLIC POWDER
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Beschreibung
Zusammenfassung:	The present disclosure provides a refurbishing method of a ruthenium (Ru)-based or ruthenium alloy-based sputtering spent target including: (a) washing or cut-processing the ruthenium-based or ruthenium alloy-based sputtering spent target; (b) placing the washed or cut-processed spent target into a mold; (c) forming a laminated structure by filling the mold in which the spent target is placed with raw powder having the same components as the spent target, and flattening the mold; (d) forming a molded body by applying a pressure to the laminated structure; and (e) sintering the molded body, and also provides a ruthenium-based or ruthenium alloy-based sputtering target refurbished by the above-described method.