Suspension conveying apparatus
The present invention discloses a suspension conveying apparatus capable of suspending and conveying a substrate without breaking it. The suspension conveying apparatus 1 of this invention comprises: a suspension stage 2, which causes a substrate W suspended; a retaining portion 51, which has an abu...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present invention discloses a suspension conveying apparatus capable of suspending and conveying a substrate without breaking it. The suspension conveying apparatus 1 of this invention comprises: a suspension stage 2, which causes a substrate W suspended; a retaining portion 51, which has an abutting portion 53 abuttingly contacted with an end surface of the substrate W, and makes the abutting portion 53 abutted against the end portion of the substrate W suspended by the suspension stage 2, thereby retaining the substrate W; and a running mechanism 52, which causes the retaining portion 51 to move along the conveying direction of the substrate W; and enables the surface of the suspension stage 2 that suspends the substrate W, namely the substrate suspension surface 23, to have a width narrower than the width of the substrate W in the widthwise direction orthogonal to the conveyance direction; when the retaining portion 51 retains the substrate W, the abutting portion 53 is abutted against the substrate W |
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