Process tray and treatment apparatus using the same

Provided is a apparatus for treating an object to be treated. The apparatus includes: a loader unit carrying a conveying tray where a plurality of objects to be treated are loaded into a carrying-in unit; a dumping unit picking up the objects to be treated from the conveying tray and performing a dumping to load the picked-up objects into a process tray; a treatment unit performing a treatment on the objects to be treated after the process tray where the objects to be treated are loaded is carried in; and a conveying unit conveying the conveying tray or the process tray between the carrying-in unit, the dumping unit, and the treatment unit, wherein the process tray includes: a lower member formed of a first material; and an upper member formed of a second material and provided to cover a top surface and a side surface of the lower member, wherein the first material is a material including metal and the second material is a material including dielectric.