Reactor filament assembly with enhanced misalignment tolerance

A tubular filament assembly for a CVD silicon deposition reactor is disclosed that provides consistent, low resistance connections to vertical tubular filaments by forming slidable connections between upper and/or lower ends of the tubular filaments and shaped elements cooperative with the bridge an...

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Bibliographische Detailangaben
Hauptverfasser:	RHODES, AARON D, BALLENGER, KEITH H
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	A tubular filament assembly for a CVD silicon deposition reactor is disclosed that provides consistent, low resistance connections to vertical tubular filaments by forming slidable connections between upper and/or lower ends of the tubular filaments and shaped elements cooperative with the bridge and/or the support chucks, so that the connections are insensitive at least to small variations in tilt angle of the vertical filaments and/or the horizontal bridge. The shaped elements can be incorporated into or separate and cooperative with the bridge and/or the chucks. Various embodiments are described.