Vacuum assembly and method of maintaining vacuum in ion implanter system
The present invention discloses a vacuum assembly and a method of maintaining vacuum in an ion implanter system. In one embodiment a vacuum assembly for an ion implanter system includes a first turbomolecular pump operatively coupled to a source chamber of the ion implanter system and a first backin...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present invention discloses a vacuum assembly and a method of maintaining vacuum in an ion implanter system. In one embodiment a vacuum assembly for an ion implanter system includes a first turbomolecular pump operatively coupled to a source chamber of the ion implanter system and a first backing line having a first end and a second end, the first end coupled to an exhaust port of the first turbomolecular pump, wherein the first turbomolecular pump and first end of the first backing line are configured to operate at a voltage potential of the source chamber. The vacuum assembly further includes a voltage insulator that is insulatively coupled to the first backing line, and a second turbomolecular pump operatively coupled to the first backing line, wherein the second turbomolecular pump is configured to operate at ground voltage potential. |
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