Wafer conveyor system and method of assembling a wafer conveyor system
The present disclosure provides a conveyor system adapted for conveying a wafer to be transported. The conveyor system includes at least one roller, at least one roller bearing adapted for rotatably holding the roller, and at least one wafer transport belt spanned over the roller. When the conveyor...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present disclosure provides a conveyor system adapted for conveying a wafer to be transported. The conveyor system includes at least one roller, at least one roller bearing adapted for rotatably holding the roller, and at least one wafer transport belt spanned over the roller. When the conveyor system is assembled, i.e. when the conveyor system is in a normal operation mode, the roller bearing is held in place by the tension of the spanned wafer transport belt. |
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