Electrolyte for electrodepositing molybdenum and method for forming molybdenum-containing layer

Electrolyte for electrodepositing molybdenum and method for forming molybdenum-containing layer

An electrolyte for electrodepositing molybdenum and a method for forming molybdenum-containing layer using the same are disclosed. The electrolyte for electrodepositing molybdenum includes 0.01 mole percent to 1 mole percent of MoCl5, 0.01 mole percent to 25 mole percent of ZnCl2, and a remaining am...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIANG, YAANG, YANG, CHAON
Format: Patent
Sprache:chi ; eng
Schlagworte:
ACYCLIC OR CARBOCYCLIC COMPOUNDS
APPARATUS THEREFOR
CHEMISTRY
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
INORGANIC CHEMISTRY
METALLURGY
ORGANIC CHEMISTRY
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
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Beschreibung
Zusammenfassung:An electrolyte for electrodepositing molybdenum and a method for forming molybdenum-containing layer using the same are disclosed. The electrolyte for electrodepositing molybdenum includes 0.01 mole percent to 1 mole percent of MoCl5, 0.01 mole percent to 25 mole percent of ZnCl2, and a remaining amount of C2H6O2S. Therefore, an electrodepositing temperature can be effectively reduced so as to save energy. Furthermore, operating convenience can be enhanced, and high temperature corrosion and a deformation or damage of a substrate due to heat can be avoided.