Ion source and ion milling apparatus

Ion source and ion milling apparatus

An ion gun (IG) has an ionizing chamber (IC) and a ion generation unit (GP) for generating ions in the ionizing chamber (IC). The ion generation unit (GP) includes an anode (13), a cathode (11), a gas supply mechanism (10), and a permanent magnet (14). The ion generation unit (GP) causes electrons e...

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Bibliographische Detailangaben
Hauptverfasser: ASAI, KENGO, SHICHI, HIROYASU, IWAYA, TORU, OHSHIMA, TAKASHI, MUTOU, HIROBUMI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:An ion gun (IG) has an ionizing chamber (IC) and a ion generation unit (GP) for generating ions in the ionizing chamber (IC). The ion generation unit (GP) includes an anode (13), a cathode (11), a gas supply mechanism (10), and a permanent magnet (14). The ion generation unit (GP) causes electrons emitted by the cathode (11) to spin due to the magnetic field generated by the permanent magnet (14), and to collide with the gas supplied by the gas supply mechanism (10), thereby generating ions in the ionizing chamber. Irregularities (IR) are then formed in the area (40) on the surface of the cathode (11) that faces the ionizing chamber (IC).