Apparatus for supporting substrate and apparatus for processing substrate including the same

Disclosed is an apparatus for supporting substrate, which is capable of preventing a plurality of lift pins for supporting a substrate from being damaged, and an apparatus for processing substrate including the same, wherein the apparatus for supporting substrate includes a susceptor onto which a su...

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Bibliographische Detailangaben
Hauptverfasser:	CHOI, JONG-SUNG, KWON, BONG-SUNG, RYU, JI-HWAN, LEE, MYUNG-JIN, JUNG, SUKUL
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	Disclosed is an apparatus for supporting substrate, which is capable of preventing a plurality of lift pins for supporting a substrate from being damaged, and an apparatus for processing substrate including the same, wherein the apparatus for supporting substrate includes a susceptor onto which a substrate is placed; a lift pin for supporting the substrate, the lift pin vertically penetrating through the susceptor; and a bushing provided in the susceptor, wherein the lift pin is inserted into the bushing, wherein the bushing is formed of a self-lubricative material for preventing the lift pin from being damaged.