Monitoring system and method for monitoring electrostatic tester

A monitoring method for monitoring an electrostatic tester is provided. The method includes: connecting a number of optical couplers to a number of electrostatic testers to be monitored one by one, and connecting the optical couplers to a single chip; detecting voltages of a voltage test point and a...

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Bibliographische Detailangaben
Hauptverfasser: TSENG, HUNG-JEN, ZHANG, GUI-ZHEN, YANG, QUAN-LONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A monitoring method for monitoring an electrostatic tester is provided. The method includes: connecting a number of optical couplers to a number of electrostatic testers to be monitored one by one, and connecting the optical couplers to a single chip; detecting voltages of a voltage test point and a connect test point of each electrostatic tester and producing a voltage testing signal and a connect testing signal via a corresponding optical couple; receiving the voltage testing signal and the connect testing signal produced by each optical couple and determining whether the corresponding electrostatic tester is worked normally according the voltage testing signal and the connect testing signal via the single chip.