Wafer inspection apparatus
A wafer inspection apparatus for inspecting at least one wafer in a cassette comprises at least a base, a loading stand, a rotating member and a rolling member. A gear portion is fixedly disposed on the loading stand. The loading stand is pivotedly disposed on the base, and the cassette is placed on...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | A wafer inspection apparatus for inspecting at least one wafer in a cassette comprises at least a base, a loading stand, a rotating member and a rolling member. A gear portion is fixedly disposed on the loading stand. The loading stand is pivotedly disposed on the base, and the cassette is placed on the loading stand. The rotating member is pivotally disposed on the loading stand for contacting and rotating the wafer in the cassette. The rolling member is engaged with the gear portion so as to adjust the inclined angle of the base. |
|---|