Wafer testing probe card

A wafer testing probe card is disclose, which includes a printed circuit board, a flexible circuit board electrically connected to the printed circuit board, an elastic piece disposed between the printed circuit board and the flexible circuit board, and a probe unit. The probe unit includes a probe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YEH, DAI-JIN, CHEN, TSUNG-YI, LI, TIENIA, CHEN, MINGI, WANG, CHIEN-KUEI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:A wafer testing probe card is disclose, which includes a printed circuit board, a flexible circuit board electrically connected to the printed circuit board, an elastic piece disposed between the printed circuit board and the flexible circuit board, and a probe unit. The probe unit includes a probe head fixed on the printed circuit board and plural probes. The probe head includes plural through holes. The probes are individually disposed in the through holes respectively. The probes may be moved up and down in the through holes.