Probe card
The present invention provides a probe card comprising: a substrate (24) having a surface (24T) on which a contact unit (22) for contacting a LSI tester (12) is disposed; a probe (28) for contacting a wafer (19) which is examined by the LSI tester (12); a fixed unit (30) disposed on a bottom surface...
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| Hauptverfasser: | , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The present invention provides a probe card comprising: a substrate (24) having a surface (24T) on which a contact unit (22) for contacting a LSI tester (12) is disposed; a probe (28) for contacting a wafer (19) which is examined by the LSI tester (12); a fixed unit (30) disposed on a bottom surface (24B) of the substrate (24), and fixing a middle portion of the probe (28); and a coaxial line (26) having a center conductor (32) and an outer conductor (36), one end of the center conductor (32) being connected to the probe (28), and the other end of the center conductor (32) being directly connected to the contact unit (22). |
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