Robot for transferring substrate, multi-chamber substrate processing apparatus using the same, and control method therefor

Disclosed herein are a substrate transfer robot for efficiently transferring a substrate, a multi-chamber substrate processing apparatus using the substrate transfer robot, and a method for controlling the apparatus. The substrate transfer robot includes a substrate holder, a plurality of robot arms permitting a three-dimensional movement of the substrate holder, and a loading chuck provided on any one of the plurality of robot arms, the loading chuck sucking or holding the substrate from a position above the substrate.