Optical gas sensor

An optical gas sensor including a substrate, a light source and at least one light detector is provided. The light source and the light detector are respectively disposed in the substrate. The gas reaction chamber structure is disposed in the substrate and connected between the light source and the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SU, SHANGIAN, LIN, JING-YUAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:An optical gas sensor including a substrate, a light source and at least one light detector is provided. The light source and the light detector are respectively disposed in the substrate. The gas reaction chamber structure is disposed in the substrate and connected between the light source and the light detector. Further, the distance from the light source to the light detector is d, and the shortest travel path of a light from the light source to the light detector through the gas reaction chamber structure is greater than d.