Device for pumping and treating gases
The invention relates to a device for pumping and treating gases comprising a stator (5) comprising a plurality of pumping stages (6, 7, 8, 9, 10) connected in series one after another between a suction side (11) and a delivery side (12) by the inter-stage ducts (24, 25), characterized in that the d...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a device for pumping and treating gases comprising a stator (5) comprising a plurality of pumping stages (6, 7, 8, 9, 10) connected in series one after another between a suction side (11) and a delivery side (12) by the inter-stage ducts (24, 25), characterized in that the device for pumping and treating gases comprises: an inner tube (14) and a blind outer tube (15), the tubes being inserted one inside the other and made of ceramic material, the inner tube (14) being connected to the delivery side of the rotor housing (19) of a pumping stage (7) and the outer tube (15) being connected to the stator and communicating with at least one inter-stage duct formed in the stator, the tubes defining a path for the pumped gases (27), and a plasma source (33) located outside the stator (5) to generate a plasma (52) in the path of the pumped gases (27). |
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