Slurry composition

A slurry composition is provided. The slurry composition includes abrasives having metal ions absorbed thereon, an oxidant and quaternary ammonium containing at least one benzyl group.

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Bibliographische Detailangaben
Hauptverfasser:	CHIANG, CHUNG-WEI, HO, YUN-LUNG, CHANG, SONG-YUAN, LU, MING-HUI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS POLISHES SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A slurry composition is provided. The slurry composition includes abrasives having metal ions absorbed thereon, an oxidant and quaternary ammonium containing at least one benzyl group.