Semiconductor device and methods for forming the same

A device includes a semiconductor substrate having a front side and a backside. A photo-sensitive device is disposed at a surface of the semiconductor substrate, wherein the photo-sensitive device is configured to receive a light signal from the backside of the semiconductor substrate, and convert t...

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Bibliographische Detailangaben
Hauptverfasser: WU, SZU-AN, SUN, CHING-YAO, TSAI, JIAN-SHIN, LEE, ING-JU, WU, JYUN-RU, HUANG, CHING, WANG, YING-LANG, HUANG, CHIHANG, CHANG, SHIHIEH
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A device includes a semiconductor substrate having a front side and a backside. A photo-sensitive device is disposed at a surface of the semiconductor substrate, wherein the photo-sensitive device is configured to receive a light signal from the backside of the semiconductor substrate, and convert the light signal to an electrical signal. An amorphous-like adhesion layer is disposed on the backside of the semiconductor substrate. The amorphous-like adhesion layer includes a compound of nitrogen and a metal. A metal shielding layer is disposed on the backside of the semiconductor substrate and contacting the amorphous-like adhesion layer.