Method and device for carrying out liquid level adjustment in continuous equipment

The invention relates to a method of allowing precise maintenance of desired relative perpendicular distance between a substrate and a liquid surface in a period of unilaterally processing a planar object based on liquid, and a device thereof. The method includes the steps of: comparing a liquid lev...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	BAIER, MARCUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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