Interferometer system for simultaneous measurement of linear displacement and tilt angle

This invention is involved with an interferometer system utilized for simultaneous linear displacement and tilt angle measurement. Components of the system include alight source, an interferometric module, an autocollimator and a signal processing module. The light source emits a linear polarized laser beam. The interferometer module consists of a polarized beam splitter (PBS), a corner cube reflector, two position sensitive detectors (PSDs), a mirror, a beam splitter (BS), two quarter wave plates and a polarizer. The light source of autocollimator is split from the measurement beam of the interferometer. A dual axis PSD and a focus lens are arranged in the autocollimator. The signal processing module acquires the signal from the interferometer and the autocollimator. And the signal will be dealt with the corresponding signal processing model. By this way, the displacement and the tilt angle of the corner cube reflector can be determined. A system for simultaneous measurement of linear displacement and tilt a