Process for preparing hydridosilanes
The present invention relates to a process for preparing hydridosilanes from halosilanes, in which (a) (i) at least one halosilane of the generic formula SinX2n+2 (where n ≥ 3 and X = F, Cl, Br and/or I) and (ii) at least one catalyst are converted to form a mixture comprising at least one halosilan...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present invention relates to a process for preparing hydridosilanes from halosilanes, in which (a) (i) at least one halosilane of the generic formula SinX2n+2 (where n ≥ 3 and X = F, Cl, Br and/or I) and (ii) at least one catalyst are converted to form a mixture comprising at least one halosilane of the generic formula SimX2m+2 (where m > n and X = F, Cl, Br and/or I) and SiX4 (where X = F, Cl, Br and/or I), and (b) the at least one halosilane of the generic formula SimX2m+2 is hydrogenated to form a hydridosilane of the generic formula SimH2m+2, the hydridosilane of the generic formula SimH2m+2 is separated from partially halogenated hydridosilanes of the general formula SimH(2m+2-y)Xy (where 1 < y < 2m+1), and the separated partially halogenated hydridosilanes of the general formula SimH(2m+2-y)Xy (where 1 < y < 2m+1) are hydrogenated again. |
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