Vacuum pump, evacuation apparatus and method of driving vacuum pump

The present invention provides a vacuum pump capable of performing a stable exhaust action without causing disordering; as well as provides an evacuation apparatus and a method of driving a vacuum pump. A method of driving the vacuum pump comprising a rotator 21, a rotor 22, a driving motor 35, and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MIYATA, KAZUYA, UEHARA, SYUUSUKE, TANABE, YUUSAKU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS WEAPONS
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Beschreibung
Zusammenfassung:	The present invention provides a vacuum pump capable of performing a stable exhaust action without causing disordering; as well as provides an evacuation apparatus and a method of driving a vacuum pump. A method of driving the vacuum pump comprising a rotator 21, a rotor 22, a driving motor 35, and an electromagnetic coupler 50 is configured to deliver the force of driving motor to a rotary by using a torque equal to or less than a first threshold (Th1), and the method of driving the vacuum pump comprises a step of detecting a load torque of the driving motor 35 such that the number of revolution of the driving motor 35 is increased while the load torque is not more than a second threshold (Th2) below the first threshold (Th1); and the number of revolution of the driving motor 35 is decreased while the load torque is in exceed of the second threshold (Th2) and not more than the first threshold (Th1).