Vacuum packaging of a compact external cavity laser system with wavelength tuning by using a micro-actuator

This invention relates to the vacuum package and the wavelength tuning mechanism of a compact external cavity diode laser system. The characteristic of the device on vacuum package is to use a vacuum feedthrough silicon plate applied to the package of laser system. There are several feedthroughs (el...

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Bibliographische Detailangaben
1. Verfasser: CHUANG, HOIAO
Format: Patent
Sprache:chi ; eng
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