capable of reducing the motor load caused by restoring force of a moving body and eliminating vibration caused by passing a singular point

The present invention relates to a transport device and a substrate processing apparatus, providing a transport device capable of reducing the motor load caused by restoring force of a moving body and eliminating vibration caused by passing a singular point. The transport device comprises a moving body linearly reciprocating in a vacuum container and a horizontal arm mechanism bendable and stretchable having therein a storage part capable of storing wiring or piping for supplying electric power, signals, fluid, or gas to the moving body. The horizontal arm mechanism comprises a first arm having one end part supported by the vacuum container capable of rotationally moving toward an approximately horizontal direction; and a second arm with one end part connected to the other end part of the first arm capable of rotationally moving toward an approximately horizontal direction, and the other end part connected to the moving body. The one end part of the first arm and the other end part of the second arm are respe