Process for condensation of chalcogen vapour and apparatus to carry out the process

Process for the condensation of chalcogen vapour (36) and recirculation of condensed chalcogen (23) into an evaporation unit (1) having the process steps of the feeding of the chalcogen vapour (36) in the condenser (9), of the condensing of at least part of the chalcogen vapour (36) fed into the con...

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Bibliographische Detailangaben
Hauptverfasser:	KOCH, RAPHAEL, BOGER, RAIMUND, KOETSCHAU, IMMO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL HEAT EXCHANGE IN GENERAL HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY LIGHTING MECHANICAL ENGINEERING METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION STEAM OR VAPOUR CONDENSERS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	Process for the condensation of chalcogen vapour (36) and recirculation of condensed chalcogen (23) into an evaporation unit (1) having the process steps of the feeding of the chalcogen vapour (36) in the condenser (9), of the condensing of at least part of the chalcogen vapour (36) fed into the condenser (9) into liquid chalcogen (23), of the recirculation of the liquid chalcogen (23) into the evaporation unit (1) via a trap (35) formed as part of a return line (17) and of the provision of a column (21) of liquid chalcogen in the trap (35), of the equalisation of pressure differentials between pressures prevailing in the condenser (9) and in the evaporation unit (1) by means of this column (21) of liquid chalcogen, of the at least partial melting of a solid chalcogen stopper (22) sealing off the trap (35), and of the control of the flow of liquid chalcogen (23) through the trap (35) by means of a melt valve (24), and apparatus to carry out this process.