Heat treatment apparatus
A heat treatment apparatus 1A includes: a heat treatment furnace 20 for storing a workpiece W; an air-conditioning portion 23 provided with a heater 32 and a blower 33; and a heat-insulating chamber 2 having communication paths 24, 25 for communicating the heat treatment furnace 20 with the air-cond...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A heat treatment apparatus 1A includes: a heat treatment furnace 20 for storing a workpiece W; an air-conditioning portion 23 provided with a heater 32 and a blower 33; and a heat-insulating chamber 2 having communication paths 24, 25 for communicating the heat treatment furnace 20 with the air-conditioning portion 23. The heat treatment apparatus 1A further includes a circulation route 5 and a catalytic portion 6. The circulation route 5 returns air flowing out from the air-conditioning portion 23 to an upper stream side than a position where the heater 32 is provided in the air-conditioning portion 23. The catalytic portion 6 decomposes sublimate generated from the workpiece W in performing heat treatment on the workpiece W. The catalytic portion 6 is provided at a lower stream side than a position where the heater 32 is provided in the air-conditioning portion 23. |
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