Recycle method of ceric abrasive

The present invention provides a technology for recycling a ceric abrasive, which effectively eliminates glass components contained in a spent ceric abrasive slurry, recovers a polishing rate and inhibits polishing scratches from occurring. A recycle method of waste abrasive slurry for recycling a s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	OGATA, SUMIKAZU, HAYASHI, KATSUHIKO, ONUKI, KEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ADHESIVES CHEMISTRY DRESSING OR CONDITIONING OF ABRADING SURFACES DYES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS PERFORMING OPERATIONS POLISHES POLISHING TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention provides a technology for recycling a ceric abrasive, which effectively eliminates glass components contained in a spent ceric abrasive slurry, recovers a polishing rate and inhibits polishing scratches from occurring. A recycle method of waste abrasive slurry for recycling a spent cereic abrasive slurry of the present invention is characterized by the steps of adding at least any one selected from a group consisting of acids free of fluorinated acid and slats thereof to a spent ceric abrasive slurry, to thereby prepare a slurry, and agitating the slurry at a circumferential velocity of 4m/sec or more.