Substrate inspection device
The present invention provides a substrate inspection device, which performs inspection efficiently while inspecting small amount of substrates, and is provided with a simple construction with lower costs. A substrate inspection device is used to inspect on/ off of the targeted wiring of the substra...
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The present invention provides a substrate inspection device, which performs inspection efficiently while inspecting small amount of substrates, and is provided with a simple construction with lower costs. A substrate inspection device is used to inspect on/ off of the targeted wiring of the substrate. The substrate inspection device is characterized in having a loading stage to carry a loading surface of the substrate; power supply means to generate inspection signals for inspecting the targeted wiring inspection; determination means to perform wiring inspection based on the detected inspection signals from the targeted wiring; and connection means to transmit the inspection signals from the power supply means to the wiring and transmit the detected inspection signals from the wiring to determination means and at the surface of the said loading surface. The connection means is provided with a first connection part to electrically connect the power supply means with one end of the wiring; and a second connect |
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