Detecting device of conductive pattern and detecting method

To provide a means capable of promptly and easily identifying a defect position of a plurality of conductive patterns formed on a substrate. The conductive pattern inspection apparatus 10 includes a supply unit 20 for supplying an electric signal to a conductive pattern 17 through a first electrode...

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1. Verfasser: YAMAOKA, SHUJI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:To provide a means capable of promptly and easily identifying a defect position of a plurality of conductive patterns formed on a substrate. The conductive pattern inspection apparatus 10 includes a supply unit 20 for supplying an electric signal to a conductive pattern 17 through a first electrode 12, an acceptor 13 for detecting each of electric signals applied by the supply unit 20 from the conductive pattern 17 via a plurality of second electrodes 14 disposed at predetermined intervals from the first electrode 12 along the conductive pattern 17, an operation unit 24 for scanning the first electrode 12 and the second electrode 14 from the first conductive pattern 17 toward the Nth conductive pattern 17, and a control unit 23 for determining a corresponding disconnected conductive pattern 17 and the disconnected position on the conductive pattern 17, based on the electric signal of each of conductive patterns 17 detected by the acceptor 13.