Polysilane-polysilazane copolymers and methods for their preparation and use

A polysilane - polysilazane copolymer contains a polysilane unit of formula, and a polysilazane unit of formula, where each R1 and each R2 are each independently selected from H, Si, and N atoms, R3 is selected from H, Si, or C atoms, a ≥ 1, b ≥ 1, and a quantity (a+b) ≥ 2. The polysilane - polysila...

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Bibliographische Detailangaben
Hauptverfasser:	MOYER, ERIC, WANOUS, MARK A, WANG, SHENG, NGUYEN, BINH THANH, CHEN, WEI, ZHOU, XIAOBING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ADHESIVES CHEMICAL PAINT OR INK REMOVERS CHEMISTRY COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS COMPOSITIONS BASED THEREON CORRECTING FLUIDS DYES FILLING PASTES INKS MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORGANIC MACROMOLECULAR COMPOUNDS PAINTS PASTES OR SOLIDS FOR COLOURING OR PRINTING POLISHES THEIR PREPARATION OR CHEMICAL WORKING-UP USE OF MATERIALS THEREFOR WOODSTAINS
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Beschreibung
Zusammenfassung:	A polysilane - polysilazane copolymer contains a polysilane unit of formula, and a polysilazane unit of formula, where each R1 and each R2 are each independently selected from H, Si, and N atoms, R3 is selected from H, Si, or C atoms, a ≥ 1, b ≥ 1, and a quantity (a+b) ≥ 2. The polysilane - polysilazane copolymer may be formulated in a composition with a solvent. The polysilane - polysilazane copolymer may be used in PMD and STI applications for trench filling, where the trenches have widths of 100 nm or less and aspect ratios of at least 6. The polysilane - polysilazane copolymer can be prepared by amination of a perchloro polysilane having 2 or more silicon atoms per molecule with a primary amine.