Static pressure bearing device and stage provided with same

Disclosed is a high-precision static pressure bearing device wherein orifices or ventilation grooves etcetera are formed, thus enabling the generation of vibrations to be prevented, and a laminar flow-state to be maintained in all areas of a pressurised gas ventilation passage. Further disclosed is...

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Hauptverfasser: ITO, MAMORU, UCHIMURA, SHOJI
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creator ITO, MAMORU
UCHIMURA, SHOJI
description Disclosed is a high-precision static pressure bearing device wherein orifices or ventilation grooves etcetera are formed, thus enabling the generation of vibrations to be prevented, and a laminar flow-state to be maintained in all areas of a pressurised gas ventilation passage. Further disclosed is a stage which is provided with the static pressure bearing device. In order to maintain laminar flow-state in all areas of a pressurised gas ventilation passage, structures such as an orifice (14), a ventilation groove (11), and an exhaust groove (12) are provided in a static pressure bearing device (1) in a manner such that the cross-sectional shape of the ventilation groove (11) in the width-ways direction forms a convex curve in the direction going away from a sliding surface (10a), and such that the ventilation groove (11) is formed so as to be symmetrical with the central line of the movement direction of a moving body (10) and comprises: an annular groove (11b), which is formed in a ring encircling the orific
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Further disclosed is a stage which is provided with the static pressure bearing device. In order to maintain laminar flow-state in all areas of a pressurised gas ventilation passage, structures such as an orifice (14), a ventilation groove (11), and an exhaust groove (12) are provided in a static pressure bearing device (1) in a manner such that the cross-sectional shape of the ventilation groove (11) in the width-ways direction forms a convex curve in the direction going away from a sliding surface (10a), and such that the ventilation groove (11) is formed so as to be symmetrical with the central line of the movement direction of a moving body (10) and comprises: an annular groove (11b), which is formed in a ring encircling the orific</description><language>chi ; eng</language><subject>BEARINGS ; BLASTING ; ELEMENTS OR CRANKSHAFT MECHANISMS ; ENGINEERING ELEMENTS AND UNITS ; FLEXIBLE SHAFTS ; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; ROTARY BODIES OTHER THAN GEARING ELEMENTS ; SHAFTS ; THERMAL INSULATION IN GENERAL ; WEAPONS</subject><creationdate>2011</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20110801&amp;DB=EPODOC&amp;CC=TW&amp;NR=201126075A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20110801&amp;DB=EPODOC&amp;CC=TW&amp;NR=201126075A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ITO, MAMORU</creatorcontrib><creatorcontrib>UCHIMURA, SHOJI</creatorcontrib><title>Static pressure bearing device and stage provided with same</title><description>Disclosed is a high-precision static pressure bearing device wherein orifices or ventilation grooves etcetera are formed, thus enabling the generation of vibrations to be prevented, and a laminar flow-state to be maintained in all areas of a pressurised gas ventilation passage. 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language chi ; eng
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subjects BEARINGS
BLASTING
ELEMENTS OR CRANKSHAFT MECHANISMS
ENGINEERING ELEMENTS AND UNITS
FLEXIBLE SHAFTS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MECHANICAL ENGINEERING
ROTARY BODIES OTHER THAN GEARING ELEMENTS
SHAFTS
THERMAL INSULATION IN GENERAL
WEAPONS
title Static pressure bearing device and stage provided with same
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