Static pressure bearing device and stage provided with same

Disclosed is a high-precision static pressure bearing device wherein orifices or ventilation grooves etcetera are formed, thus enabling the generation of vibrations to be prevented, and a laminar flow-state to be maintained in all areas of a pressurised gas ventilation passage. Further disclosed is...

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Bibliographische Detailangaben
Hauptverfasser: ITO, MAMORU, UCHIMURA, SHOJI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Disclosed is a high-precision static pressure bearing device wherein orifices or ventilation grooves etcetera are formed, thus enabling the generation of vibrations to be prevented, and a laminar flow-state to be maintained in all areas of a pressurised gas ventilation passage. Further disclosed is a stage which is provided with the static pressure bearing device. In order to maintain laminar flow-state in all areas of a pressurised gas ventilation passage, structures such as an orifice (14), a ventilation groove (11), and an exhaust groove (12) are provided in a static pressure bearing device (1) in a manner such that the cross-sectional shape of the ventilation groove (11) in the width-ways direction forms a convex curve in the direction going away from a sliding surface (10a), and such that the ventilation groove (11) is formed so as to be symmetrical with the central line of the movement direction of a moving body (10) and comprises: an annular groove (11b), which is formed in a ring encircling the orific