Process for producing semiconductive indium oxide layers, indium oxide layers prepared by the process and use thereof

The present invention relates to a process for producing semiconductive indium oxide layers, in which a substrate is coated with a liquid, anhydrous composition comprising (a) at least one indium alkoxide and (b) at least one solvent, optionally dried and thermally treated at temperatures greater th...

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Bibliographische Detailangaben
Hauptverfasser: HOPPE, ARNE, STEIGER, JUERGEN, MERKULOV, ALEXEY, THIEM, HEIKO, PHAM, DUY VU, DAMASCHEK, YVONNE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The present invention relates to a process for producing semiconductive indium oxide layers, in which a substrate is coated with a liquid, anhydrous composition comprising (a) at least one indium alkoxide and (b) at least one solvent, optionally dried and thermally treated at temperatures greater than 250 DEG C, to the layers producible by this process, and to the use thereof.