Turbomolecular pump

A turbomolecular pump comprises a rotor element (12) arranged in a pump housing (18). The rotor element (12) is surrounded by a stator element (24). Between the stator element (24) and the pump housing (18), a gap (36) is provided. For absorption of energy in case that the rotor element (12) should...

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Bibliographische Detailangaben
Hauptverfasser: ENGLAENDER, HEINRICH, RICHTER, MICHAEL, ROTH, ISHAN, HASS, STEFAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A turbomolecular pump comprises a rotor element (12) arranged in a pump housing (18). The rotor element (12) is surrounded by a stator element (24). Between the stator element (24) and the pump housing (18), a gap (36) is provided. For absorption of energy in case that the rotor element (12) should burst, an energy absorption element (44) is arranged in the gap (36).