Turbomolecular pump
A turbomolecular pump comprises a rotor element (12) arranged in a pump housing (18). The rotor element (12) is surrounded by a stator element (24). Between the stator element (24) and the pump housing (18), a gap (36) is provided. For absorption of energy in case that the rotor element (12) should...
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Sprache: | chi ; eng |
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Zusammenfassung: | A turbomolecular pump comprises a rotor element (12) arranged in a pump housing (18). The rotor element (12) is surrounded by a stator element (24). Between the stator element (24) and the pump housing (18), a gap (36) is provided. For absorption of energy in case that the rotor element (12) should burst, an energy absorption element (44) is arranged in the gap (36). |
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