Sealing structure for high-k metal gate and method of making

The present disclosure provides a semiconductor device that includes a semiconductor substrate and a transistor formed in the substrate. The transistor includes a gate stack having a high-k dielectric and metal gate, a sealing layer formed on sidewalls of the gate stack, the sealing layer having an...

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Bibliographische Detailangaben
Hauptverfasser: CHEN, CHIEN-LIANG, NG, JIN-AUN, FEI, CHUNG-HAU, LIEN, HAO-MING, LI, CHII-HORNG, LIN, KANGNG, CHANG, CHI-HSIN, CHEN, CHIEN-HAO, LI, SSU-YI, YANG, WENIH, CHUANG, HARRY, YEH, JUN-LIN, HUANG, KUO-TAI, LIN, CHUN-MING
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The present disclosure provides a semiconductor device that includes a semiconductor substrate and a transistor formed in the substrate. The transistor includes a gate stack having a high-k dielectric and metal gate, a sealing layer formed on sidewalls of the gate stack, the sealing layer having an inner edge and an outer edge, the inner edge interfacing with the sidewall of the gate stack, a spacer formed on the outer edge of the sealing layer, and a source/drain region formed on each side of the gate stack, the source/drain region including a lightly doped source/drain (LDD) region that is aligned with outer edge of the sealing layer.