Lithographic apparatus and method

A drive system for controllably driving an electric actuator includes a current sensor system to sense a current conducted by the actuator and a driver to electrically drive the actuator based on an output signal of the current sensor system. The current sensor system includes at least a first and a...

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Bibliographische Detailangaben
Hauptverfasser:	VAN GILS, PETRUS JACOBUS MARIA, BUTLER, HANS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY ELECTROGRAPHY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERATION HOLOGRAPHY MATERIALS THEREFOR MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS REGULATING
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Beschreibung
Zusammenfassung:	A drive system for controllably driving an electric actuator includes a current sensor system to sense a current conducted by the actuator and a driver to electrically drive the actuator based on an output signal of the current sensor system. The current sensor system includes at least a first and a second current sensor that have a mutually different sensitivity for the current to be sensed and the drive system includes a current sensor controller to control an extent to which each of the current sensors to determine the output signal of the current sensor system.