Conveyance robot, locally cleaned housing with the conveyance robot, and semiconductor manufacturing device with the housing

Conveyance robot, locally cleaned housing with the conveyance robot, and semiconductor manufacturing device with the housing

A conveyance robot suitable for mounting on a locally cleaned housing. The conveyance robot has a body (14) having a thin plate (28), a lifting mechanism (20), and a movement unit (48). The thin plate (28) has an upper end located below the lowermost part of a first arm (12) and has a vertical surfa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UMEZAKI, TAKAHIRO, SHIMADA, KATSUHIKO, YAMAMOTO, HIDEO
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Beschreibung
Zusammenfassung:A conveyance robot suitable for mounting on a locally cleaned housing. The conveyance robot has a body (14) having a thin plate (28), a lifting mechanism (20), and a movement unit (48). The thin plate (28) has an upper end located below the lowermost part of a first arm (12) and has a vertical surface provided with a fixation section (49) to which the conveyance robot (8) is fixed in a vertical position. The lifting mechanism (20) is provided on the vertical surface. The movement unit (48) rotatably supports the first arm (12) and can be lifted and lowered by the lifting mechanism (20) along the vertical surface.